Local sonos-type structure having two-piece gate and self-aligned ono and method for manufacturing the same
作者： Geum-Jong Bae , Jin-Hee Kim , Sung-Ho Kim , Nae-in Lee , Ki Chul Kim
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摘要: A local SONOS structure having a two-piece gate and self-aligned ONO includes: substrate; an on the first layer aligned with structure; insulator substrate aside second insulator. The layers are electrically connected together. Together, define at least 1-bit structure. corresponding method of manufacture providing forming insulator; connecting layers.
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