Influence of substrate on mechanical properties of TiN/NbN superlattices
作者： H. Wrzesińska , P. Grabiec , Z. Rymuza , M. Misiak
DOI: 10.1016/S0167-9317(02)00585-3
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摘要: Abstract The substrate material and number of periods both significantly impact the hardness Young’s modulus TiN/NbN superlattices with a period ‘Λ’ 4.68 nm. change as function depth well distribution these properties on small areas were measured. effect loading rate results nanomechanical measurements was also proved. structure is very stable practically no rheological phenomena observed. testifies to high uniformity films along surface.
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sci-hub.se 参考文章(5)
S. Vepřek, S. Reiprich, A concept for the design of novel superhard coatings Thin Solid Films. ,vol. 268, pp. 64- 71 ,(1995) , 10.1016/0040-6090(95)06695-0
W. D. Sproul, New Routes in the Preparation of Mechanically Hard Films Science. ,vol. 273, pp. 889- 892 ,(1996) , 10.1126/SCIENCE.273.5277.889
Takashi Onishi, Eiji Iwamura, Katsutoshi Takagi, Kazuo Yoshikawa, Influence of adding transition metal elements to an aluminum target on electrical resistivity and hillock resistance in sputter‐deposited aluminum alloy thin films Journal of Vacuum Science and Technology. ,vol. 14, pp. 2728- 2735 ,(1996) , 10.1116/1.580194
Shinji Takayama, Naganori Tsutsui, AlSm and AlDy alloy thin films with low resistivity and high thermal stability for microelectronic conductor lines Thin Solid Films. ,vol. 289, pp. 289- 294 ,(1996) , 10.1016/S0040-6090(96)08882-7
H. Gleiter, Nanostructured materials: state of the art and perspectives Nanostructured Materials. ,vol. 6, pp. 3- 14 ,(1995) , 10.1016/0965-9773(95)00025-9