MOVPE growth experiments of the novel (GaIn)(NP)/GaP material system

作者: Bernardette Kunert , Jörg Koch , Torsten Torunski , Kerstin Volz , Wolfgang Stolz

DOI: 10.1016/J.JCRYSGRO.2004.08.091

关键词:

摘要: Abstract Highly compressively strained (GaIn)(NP) quantum wells have been grown on (1 0 0) GaP substrates by metal organic vapour-phase epitaxy (MOVPE). We achieve a high structural quality of the multiple well structures for this novel, metastable material system. Competition between group-V elements surface determines N incorporation in Ga(NP) as (GaIn)(NP). For ternary system content deposited layers does not depend growth rate contrast to quaternary (GaIn)(NP), where is enhanced with increasing rate. This suggests desorption controlled process In-containing material. accordance strong dependence from temperature and In content. addition — due metastability systems under investigation maximal achievable limited when good crystal be retained.

参考文章(8)
J.F. Geisz, R.C. Reedy, B.M. Keyes, W.K. Metzger, Unintentional carbon and hydrogen incorporation in GaNP grown by metal-organic chemical vapor deposition Journal of Crystal Growth. ,vol. 259, pp. 223- 231 ,(2003) , 10.1016/J.JCRYSGRO.2003.07.011
Y Takagi, H Yonezu, K Samonji, T Tsuji, N Ohshima, Generation and suppression process of crystalline defects in GaP layers grown on misoriented Si(100) substrates Journal of Crystal Growth. ,vol. 187, pp. 42- 50 ,(1998) , 10.1016/S0022-0248(97)00862-2
W. G. Bi, C. W. Tu, N incorporation in GaP and band gap bowing of GaNxP1−x Applied Physics Letters. ,vol. 69, pp. 3710- 3712 ,(1996) , 10.1063/1.117197
P. J. Klar, H. Grüning, J. Koch, S. Schäfer, K. Volz, W. Stolz, W. Heimbrodt, A. M. Kamal Saadi, A. Lindsay, E. P. O’Reilly, (Ga, In)(N, As)-fine structure of the band gap due to nearest-neighbor configurations of the isovalent nitrogen Physical Review B. ,vol. 64, pp. 121203- ,(2001) , 10.1103/PHYSREVB.64.121203
D.J. Friedman, J.F. Geisz, S.R. Kurtz, J.M. Olson, R. Reedy, Nonlinear dependence of N incorporation on In content in GaInNAs Journal of Crystal Growth. ,vol. 195, pp. 438- 443 ,(1998) , 10.1016/S0022-0248(98)00562-4
W.G. Bi, X.B. Mei, C.W. Tu, Growth studies of GaP on Si by gas-source molecular beam epitaxy Journal of Crystal Growth. ,vol. 164, pp. 256- 262 ,(1996) , 10.1016/0022-0248(96)00026-7
Mahdad Sadeghi, Shumin Wang, Growth of GaP on Si substrates by solid-source molecular beam epitaxy Journal of Crystal Growth. ,vol. 227, pp. 279- 283 ,(2001) , 10.1016/S0022-0248(01)00705-9
A.J Ptak, Sarah Kurtz, C Curtis, R Reedy, J.M Olson, Incorporation effects in MOCVD-grown (In)GaAsN using different nitrogen precursors Journal of Crystal Growth. ,vol. 243, pp. 231- 237 ,(2002) , 10.1016/S0022-0248(02)01412-4