On the Deembedding Issue of CMOS Multigigahertz Measurements
作者： Ammar Issaoun , Yong Zhong Xiong , Jinglin Shi , James Brinkhoff , Fujiang Lin
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摘要: The purpose of this paper is to address the issues deembedding multigigahertz CMOS measurements by extensively comparing six popular methods and proposing a new method based on two-port measurements. comparison aims evaluate maximum applicable frequency equivalent-circuit (open-short, three step, ...) effect source dangling leg MOSFETs cascade (two line thru). Fifty dummy structures 12 were fabricated using standard 0.18-mum technology. It was found that, at low frequencies (<6 GHz), all results comparable. open-short performed well over entire range (0.1-40 GHz) studied. newly developed method, called thru-short uses only two structures, thru short, completely deembed parasitics from probe pads, interconnects, semiconducting substrate. validated algorithm showed its usefulness for on-wafer
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