作者: Naoki Kusunoki , Fumitaka Arai , Nobutoshi Aoki , Hiroyoshi Tanimoto , Riichiro Shirota
DOI:
关键词:
摘要: A non-volatile semiconductor memory includes a plurality of cell transistors, each the transistors includes: source region having first conductivity type and in contact with buried insulating layer on supporting substrate; drain layer; channel provided between so as to layer, wherein thickness is more than one nm not value obtained by adding seven half gate length transistor.