Inductor formed in an integrated circuit
作者： Edward Belden Harris , Kurt George Steiner , Sailesh Mansinh Merchant , Susan Clay Vitkavage
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摘要: An inductor formed within an integrated circuit and a method for forming the inductor. The comprises underlying layer of aluminum in first metallization patterned etched into desired shape. In one embodiment line spiral According to damascene process, conductive runner, preferably copper, is dielectric overlying electrical contact therewith. runner cooperate form another are vertically spaced-apart orientation, with tungsten plugs or vias provide connection therebetween. A over line.
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