Characterization of micromachined silicon rectangular waveguide at 400 GHz
作者： P.L. Kirby , D. Pukala , H. Manohara , I. Mehdi , J. Papapolymerou
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摘要: … characterization of the waveguide in terms of loss. The third method is using silicon micromachining to form the waveguides. Etching of silicon to form waveguides is accomplished by …
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