Vertical contact position detection and grasping force monitoring for micro-gripper applications
作者： M. Porta , J. Wei , M. Tichem , P.M. Sarro , U. Staufer
DOI: 10.1109/ICSENS.2009.5398198
关键词:
摘要: A piezoresistive sensor for micro-grippers, capable of detecting the contact position micro-object along vertical dimension grasping surface as well force, has been developed and successfully tested. The integration this into micro-grippers would improve their reliability because monitoring is fundamental in many micro-assembly tasks. device fabricated with an IC-compatible process integrates two force sensors a Wheatstone bridge configuration, whose outputs allow computation applied force. sensitivity 16.9V/N, supply 1V across bridge. maximum detectable up to 3mN estimated resolution better than 1µN. depends on Results show that 10µm can be distinguished direction when 1mN applied.
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