Evolution of Si suboxides into Si nanocrystals during rapid thermal annealing as revealed by XPS and Raman studies
作者： Wali Zhang , Sam Zhang , Yang Liu , Tupei Chen
DOI: 10.1016/J.JCRYSGRO.2008.12.038
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摘要: … of nc-Si during RTA. This paper presents a quantitative study of X-ray photoelectron spectroscopy (XPS) … RTA and to address the mechanism of the formation and rapid growth of nc-Si. …
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