作者: E. Iliopoulos , K. F. Ludwig , T. D. Moustakas , S. N. G. Chu
DOI: 10.1063/1.1341222
关键词:
摘要: … On-axis –2 XRD spectra of AlGaN films grown under the … which are expected for wurtzite AlGaN structures the 0001 diffraction … Figure 3 shows in detail the XRD pattern of the sample …