Fabrication Processes for Sensors for Automotive Applications: A Review
作者： Aviru Kumar Basu , Shreyansh Tatiya , Geeta Bhatt , Shantanu Bhattacharya
DOI: 10.1007/978-981-13-3290-6_8
关键词:
摘要: … MEMS devices are hugely deployed for automobiles sectors like accelerometer, gyroscopes… , one-step lithography process to create three-dimensional micro/nanostructures in a thin …
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