Deposition and XPS studies of dual sputtered BCN thin films
作者： Adithya Prakash , Kalpathy B. Sundaram
DOI: 10.1016/J.DIAMOND.2016.01.014
关键词:
摘要: … capability and refractive index variability in BCN thin film, it is feasible to develop filters and … Several methods for preparing BCN films such as chemical vapor deposition (CVD) [17], [18]…
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