A set of cross sections and transport coefficients for electrons in HBr
作者： O. Šašić , S. Dujko , T. Makabe , Z.Lj. Petrović
DOI: 10.1016/J.CHEMPHYS.2011.08.019
关键词: Fluid modeling 、 Plasma etching 、 Chemistry 、 Electron 、 Constant (mathematics) 、 Set (abstract data type) 、 Plasma 、 Cross section (physics) 、 Atomic physics 、 Monte Carlo method
摘要: Abstract We have compiled a set of electron collision cross sections for HBr. It will be useful fluid modeling HBr plasmas together with transport coefficients in both DC and RF, E × B fields. The calculation made use Monte Carlo technique. are rather unstructured because the total section resembles that constant collisonal frequency model. Additional measurements swarm parameters required order to obtain more acurate sections.
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