MEMS ultra low leak detection methods: a review
作者： Suzanne Millar , Marc Desmulliez
DOI: 10.1108/02602280910986584
关键词: Electronic engineering 、 Sensitivity (control systems) 、 Engineering 、 Microelectromechanical systems 、 Leak detection 、 Optical test
摘要: Purpose – The purpose of this paper is to review traditional hermeticity test methods when applied typical micro‐electro‐mechanical systems (MEMS) cavity volumes and propose potential solutions.Design/methodology/approach Standards for testing have been MEMS the resulting issues range sensitivity discussed. In situ structures designed fabricated with access internal cavities allow characterisation as a function pressure.Findings ultra low leak rates necessary guarantee cannot be measured using methods. Optical are possible although in currently provide greatest sensitivity. A portfolio techniques required accurate MEMS.Research limitations/implications This provides starting point further investigation into several testing.Original...
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researchgate.net 参考文章(11)
David Veyrié, Approche alternative de l'évaluation de l'herméticité des micro cavités : application au packaging des MEMS Université Boredaux 1. ,(2007)
A. Jourdain, P. De Moor, S. Pamidighantam, H.A.C. Tilmans, Investigation of the hermeticity of BCB-sealed cavities for housing (RF-)MEMS devices international conference on micro electro mechanical systems. pp. 677- 680 ,(2002) , 10.1109/MEMSYS.2002.984361
W. H. Weber, M. Zanini-Fisher, M. J. Pelletier, Using Raman Microscopy to Detect Leaks in Micromechanical Silicon Structures Applied Spectroscopy. ,vol. 51, pp. 123- 129 ,(1997) , 10.1366/0003702971938876
I. de Wolf, A. Jourdain, P. de Moor, H. A.C. Tilmans, L. Marchand, Hermeticity Testing and Failure Analysis of MEMS Packages 2007 14th International Symposium on the Physical and Failure Analysis of Integrated Circuits. pp. 147- 154 ,(2007) , 10.1109/IPFA.2007.4378075
F. Gueissaz, Ultra low leak detection method for MEMS devices international conference on micro electro mechanical systems. pp. 524- 527 ,(2005) , 10.1109/MEMSYS.2005.1453982
R.S. Dhariwal, J.-M. Torres, M.P.Y. Desmulliez, Electric field breakdown at micrometre separations in air and nitrogen at atmospheric pressure IEE Proceedings - Science, Measurement and Technology. ,vol. 147, pp. 261- 265 ,(2000) , 10.1049/IP-SMT:20000506
A. Jourdain, H. Ziad, P. De Moor, H.A.C. Tilmans, Wafer-scale 0-level packaging of (RF-)MEMS devices using BCB symposium on design, test, integration and packaging of mems/moems. pp. 239- 244 ,(2003) , 10.1109/DTIP.2003.1287044
G. Elger, L. Shiv, N. Nikac, F. Muller, R. Liebe, M. Grigat, Optical leak detection for wafer level hermeticity testing international electronics manufacturing technology symposium. pp. 326- 331 ,(2004) , 10.1109/IEMT.2004.1321684
P.J. van der Wel, J. Stulemeijer, J.A. Bielen, F.G.A. Theunis, A. den Dekker, M.A.J. van Gils, R.J. Havens, Hermeticity testing of capacitive RF MEMS switches international reliability physics symposium. pp. 691- 692 ,(2008) , 10.1109/RELPHY.2008.4558991
Hal Greenhouse, Hermeticity of electronic packages ,(2000)