Fabrication and optical properties of non-polar III-nitride air-gap distributed Bragg reflector microcavities
作者： Renchun Tao , Munetaka Arita , Satoshi Kako , Yasuhiko Arakawa
DOI: 10.1063/1.4832069
关键词: Distributed Bragg reflector 、 Optics 、 Fabrication 、 Quantum well 、 Wide-bandgap semiconductor 、 Optoelectronics 、 Photoluminescence 、 Q factor 、 Materials science 、 Nitride 、 Birefringence
摘要: Using the thermal decomposition technique, non-polar III-nitride air-gap distributed Bragg reflector (DBR) microcavities (MCs) with a single quantum well have been fabricated. Atomic force microscopy reveals locally smooth DBR surface, and room-temperature micro-photoluminescence measurements show cavity modes. There are two modes per due to optical birefringence in MCs, systematic mode shift thickness was also observed. Although structures consist of only 3 periods (top) 4 (bottom), quality factor 1600 (very close theoretical value 2100) high MCs.
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