Symmetric vhf plasma power coupler with active uniformity steering
作者： Kartik Ramaswamy , Kenneth S. Collins , Andrew Nguyen , James D. Carducci , Zhigang Chen
DOI:
关键词: Optics 、 Electrical conductor 、 Engineering 、 Electrical engineering 、 Power (physics) 、 Conductor 、 Coaxial 、 Plasma
摘要: A coaxial VHF power coupler includes conductive element inside a hollow cylindrical outer conductor of the and surrounding an axial section inner coupler. Respective plural motor drives contacting are connected to respective locations movable element.
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