Multilayer microcavity devices and methods

摘要: Microcavities and micropores that are microscopic (<1 mm) in width depth contain any number of individually-addressable electrodes, separated by insulators, along the walls each cavity. The conducting materials, insulator materials can be deposited alternately onto a starting substrate, which is typically an oxidized silicon wafer or polyimide film, but may substrate shows good adhesion to layered on it. cavities etched through these layers, perpendicular plane exposing layers at their edges. Pores carved entirely device.