About the nature of particulates covering the surface of thin films obtained by reactive pulsed laser deposition
作者： I N Mihailescu , V S Teodorescu , E Gyorgy , A Luches , A Perrone
DOI: 10.1088/0022-3727/31/18/006
关键词: Layer (electronics) 、 Methane 、 Pulsed laser deposition 、 Lattice constant 、 Thin film 、 Materials science 、 Mineralogy 、 Analytical chemistry 、 Impact crater 、 Stoichiometry 、 Particulates
摘要: We report new results concerning the composition and structure of particulates covering surface thin films deposited by reactive pulsed laser deposition (RPLD) from a Ti target in low-pressure methane. show that small having diameters smaller than 0.5 m have morphology identical to which consist pure, stoichiometric, cubic TiC with lattice parameter 0.436 nm. In contrast, larger up 3 are mixture prevalent unreacted Ti. All seem spherical geometrical shape at moment their impact onto collector. consider this feature is congruent formation expulsion liquid phase melted layer existing inside crater forming on target's under action irradiation.
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