Method and apparatus for delivering process gas to a process chamber
作者： Steven Fink
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摘要: A gas delivery system for a plasma apparatus including first plate having inlet, and second plurality of holes. The is coupled to the spaced apart from form plenum chamber. baffle honeycomb core disposed between in side can be comprised one or more panels. surface panels panel contoured control pressure distribution assembly also includes inlet chamber therebetween. injection has such that length each holes varies depending on location surface.
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