Methods of forming metal-comprising materials and capacitor electrodes; and capacitor constructions
作者： Haining Yang
DOI:
关键词:
摘要: The invention includes a method of forming metal-comprising mass for semiconductor construction. A substrate is provided, and metallo-organic precursor provided proximate the substrate. exposed to reducing atmosphere release metal from precursor, subsequently released deposited over also capacitor constructions, methods constructions.
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