Multiple site, differential displacement, surface contacting assembly

摘要: A multiple site probe for simultaneous probing of chip clusters pads. The assembly includes a mounting plate having plurality groups adjustably mounted probes thereon. cams cooperate with cam followers associated individual probes, each the and displacement which is dependent upon its distance from predetermined fixed reference relative to plate. An actuator connected so as effect actuation allow differential group compensate accumulated tolerances and/or shrinkage substrate.