Effect of excess Pb on ferroelectric characteristics of conductive Al-doped ZnO and Sn-doped In2O3 top electrodes in PbLaZrTiOx capacitors
作者： Yoko Takada , Toru Tsuji , Naoki Okamoto , Takeyasu Saito , Kazuo Kondo
DOI: 10.3139/146.111154
关键词:
摘要: Abstract The Pb content effect of chemical solution deposited lanthanum-doped lead zirconate titanate (PLZT) (Pb:La:Zr:Ti = Pb:3:30:70, 105∼117) was studied for conductive aluminum-doped zinc oxide (AZO) and tin-doped indium (ITO) as top electrodes by means pulsed laser deposition. crystallinity, surface morphology, ferroelectric properties hydrogen degradation resistance the ITO/PLZT/Pt AZO/PLZT/Pt capacitors were evaluated. All PLZT films showed perovskite phase (revealed X-ray diffraction patterns) similar morphology grain size scanning electron microscopy images). with a 113 exhibited largest remnant polarization (at 15 V (300 kV cm−1)), however, difference in small between four levels content.
hanser-elibrary.com参考文章(41)
Hirotaka Nakagawa, Kazuo Kanematsu, Magnetic and X-Ray Studies on (Fe1-xVx)3Ge Japanese Journal of Applied Physics. ,vol. 18, pp. 1959- 1963 ,(1979) , 10.1143/JJAP.18.1959
C.W. Law, K.Y. Tong, J.H. Li, K. Li, Effect of pyrolysis temperature on the characteristics of PZT films deposited by the sol-gel method Thin Solid Films. ,vol. 335, pp. 220- 224 ,(1998) , 10.1016/S0040-6090(98)00813-X
Jun-Kyu Yang, Woo Sik Kim, Hyung-Ho Park, The effect of excess Pb content on the crystallization and electrical properties in sol–gel derived Pb (Zr0.4Ti0.6)O3 thin films Thin Solid Films. ,vol. 377-378, pp. 739- 744 ,(2000) , 10.1016/S0040-6090(00)01325-0
Yoko Takada, Toru Tsuji, Naoki Okamoto, Takeyasu Saito, Kazuo Kondo, Takeshi Yoshimura, Norifumi Fujimura, Koji Higuchi, Akira Kitajima, Akihiro Oshima, Aluminum-doped zinc oxide electrode for robust (Pb,La)(Zr,Ti)O 3 capacitors: effect of oxide insulator encapsulation and oxide buffer layer Journal of Materials Science: Materials in Electronics. ,vol. 25, pp. 2155- 2161 ,(2014) , 10.1007/S10854-014-1853-Y
Maxim I. Morozov, Dragan Damjanovic, Hardening-softening transition in Fe-doped Pb(Zr,Ti)O3 ceramics and evolution of the third harmonic of the polarization response Journal of Applied Physics. ,vol. 104, pp. 034107- ,(2008) , 10.1063/1.2963704
Anupama Sachdeva, R.P. Tandon, Effect of sol composition on dielectric and ferroelectric properties of PZT composite films Ceramics International. ,vol. 38, pp. 1331- 1339 ,(2012) , 10.1016/J.CERAMINT.2011.09.009
A Ignatiev, Y.Q Xu, N.J Wu, D Liu, Pyroelectric, ferroelectric and dielectric properties of Mn and Sb-doped PZT thin films for uncooled IR detectors Materials Science and Engineering: B. ,vol. 56, pp. 191- 194 ,(1998) , 10.1016/S0921-5107(98)00220-7
San-Yuan Chen, Chia-Liang Sun, Ferroelectric characteristics of oriented Pb(Zr1−xTix)O3 films Journal of Applied Physics. ,vol. 90, pp. 2970- 2974 ,(2001) , 10.1063/1.1394159
P. Verardi, F. Craciun, N. Scarisoreanu, G. Epurescu, M. Dinescu, I. Vrejoiu, A. Dauscher, Synthesis and characterization of PLZT thin films obtained by pulsed laser deposition Applied Physics A. ,vol. 79, pp. 1283- 1285 ,(2004) , 10.1007/S00339-004-2751-6
Zhan-jie Wang, Ryutaro Maeda, Kaoru Kikuchi, Effect of Pb Content on Electric Properties of Sol-Gel Derived Lead Zirconate Titanate Thin Films Prepared by Three-Step Heat-Treatment Process Japanese Journal of Applied Physics. ,vol. 38, pp. 5342- 5345 ,(1999) , 10.1143/JJAP.38.5342