Large-angle in-plane light scattering from rough surfaces.

摘要: An in-plane light scattering setup that is capable of measuring large azimuthal scattering angles is presented. This type of measurement makes it easier to probe large k_‖ at a fixed k_⊥ value (k_‖ and k_⊥ are momentum transfer vectors parallel and perpendicular to the surface, respectively). Therefore the system allows us to explore small lateral scale and large vertical roughness (∼ λ, the wavelength of the probe beam) of a rough surface. In-plane intensity measurements from a rough backside Si wafer and a Cu thin-film surface are …