Fluid mixing system
作者： Kiyoshi Kurosawa , Norihiro Noda
DOI:
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摘要: An object of the present invention is to provide a fluid mixing system able mix fluids different lines by any ratio and control flow rates even pulsating fluids, rate fluid, compact in configuration be installed narrow space, enabling easy pipe laying connection at time installation. In invention, its two feed are provided with first second valves, measuring devices actual outputting signals, units command signals for controlling valves flowing through ratio. The valve controls pressure operation while changes opening area channel fluid. example, obtain washing solution semiconductor production, hydrofluoric acid or hydrochloric mixed pure water 1 part 10 200 parts.
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