Electrical properties of n-type vapor-grown gallium nitride

作者: M. Ilegems , H.C. Montgomery

DOI: 10.1016/S0022-3697(73)80090-3

关键词:

摘要: Abstract Hall measurements are reported for undoped and Zn-doped vapor-grown single crystal GaN on (0001) Al 2 O 3 layers with 298 K carrier concentrations ( n -type) between 1·4×10 17 cm −3 9×10 19 . Then ∼10 crystals (undoped) have mobilities up to μ ∼440 /V sec at K. Their conduction behavior can be described by a two-donor model 150 1225 impurity band transport below Crystals ≥8×10 18 show metallic no appreciable variation in or 10 Results of mass spectrographic analyses indicate that the total level impurities detected is too low account observed electron concentration level, suggest presence high native donors these crystals. No significant reduction was achieved Zn doping 20 under growth conditions present work, evidence found conductivity p -type may GaN. The influence factors such as rate, crystalline perfection vapor phase composition during properties described.

参考文章(24)
H. M. Manasevit, F. M. Erdmann, W. I. Simpson, The Use of Metalorganics in the Preparation of Semiconductor Materials IV . The Nitrides of Aluminum and Gallium Journal of The Electrochemical Society. ,vol. 118, pp. 1864- 1868 ,(1971) , 10.1149/1.2407853
M Ilegems, Vapor epitaxy of gallium nitride Journal of Crystal Growth. pp. 360- 364 ,(1972) , 10.1016/0022-0248(72)90184-4
R. B. Zetterstrom, Synthesis and growth of single crystals of gallium nitride Journal of Materials Science. ,vol. 5, pp. 1102- 1104 ,(1970) , 10.1007/BF02403284
D.K. Wickenden, K.R. Faulkner, R.W. Brander, B.J. Isherwood, Growth of epitaxial layers of gallium nitride on silicon carbide and corundum substrates Journal of Crystal Growth. ,vol. 9, pp. 158- 164 ,(1971) , 10.1016/0022-0248(71)90225-9
B. B. Kosicki, D. Kahng, Preparation and Structural Properties of GaN Thin Films Journal of Vacuum Science and Technology. ,vol. 6, pp. 593- 596 ,(1969) , 10.1116/1.1315693
D. L. Rode, Electron Mobility in II-VI Semiconductors Physical Review B. ,vol. 2, pp. 4036- 4044 ,(1970) , 10.1103/PHYSREVB.2.4036
A. R. Hutson, Hall Effect Studies of Doped Zinc Oxide Single Crystals Physical Review. ,vol. 108, pp. 222- 230 ,(1957) , 10.1103/PHYSREV.108.222
N.F. Mott, W.D. Twose, The theory of impurity conduction Advances in Physics. ,vol. 10, pp. 107- 163 ,(1961) , 10.1080/00018736100101271
H. C. Montgomery, Hall Measurements of Te‐Doped Gallium Phosphide of Improved Homogeneity Journal of Applied Physics. ,vol. 39, pp. 2002- 2005 ,(1968) , 10.1063/1.1656479
Chikako Yamanouchi, Kanji Mizuguchi, Wataru Sasaki, Electric Conduction in Phosphorus Doped Silicon at Low Temperatures Journal of the Physical Society of Japan. ,vol. 22, pp. 859- 864 ,(1967) , 10.1143/JPSJ.22.859