Preparation and properties of different types of sputtered MoS2 films

摘要: Abstract MoS 2 is widely used as a dry lubricant. For special applications, for example bearings space mechanisms, it applied in the form of sputter-deposited films. The lamellar structure this material, orientation lamellae and stoichiometry coating are important sliding process thus tribological performance. It shown that these properties can be varied to large extent by variation single parameter deposition process. This parameter, which usually not controlled quantitatively, amount H O present plasma. Furthermore, first time all three different types sputtered films, namely type I, II amorphous, produced solely.