Micromachined Membrane Filters for Microwave and () Millimeter-Wave Applications Invited Article

摘要: Recent developments in micromachining techniques at the University of Michigan have resulted novel high-performance low-loss filters for microwave and millimeter-wave applications. The idea is based on suspending thin dielectric membranes to eliminate loss dispersion problems, resulting a pure TEM mode propagation conductor-loss-limited performance. membrane surrounding cavities are built using chemical etching Silicon GaAs wafers. therefore compatible with low-cost IC fabrication can be com- bined planar diodes transistors result active filter networks. Several state-of-the-art been realized including 15-GHz 20-GHz bandpass interdigi- tal suspended stripline filters, lowpass microshield 30 GHz 90 GHz, microstrip 94-GHz 250-GHz 1.0-1.5-dB insertion loss. This article reviews associated techniques, different types transmission lines achieved this technology, measured performance from 15 350 GHz. study concludes detailed description future work area. Q 1997 John Wiley & Sons, Inc. Int J Microwa'e Millimeter-Wa'e CAE 7: 149-166, 1997.