作者: Bruce E. White , Douglas R. Roberts , Bradley M. Melnick , Bo Jiang
DOI:
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摘要: A dielectric film (110) is formed overlying a semiconductor device substrate (10). post (204) having an outer peripheral boundary sidewalls over the (110). first conductive (402) deposited at least along of to form lower electrode. capacitor (1801) on film, and upper electrode (1802) (1801).