Homogeneity issues in chemical solution deposition of Pb(Zr,Ti)O3 thin films
作者： Barbara Malic , Marija Kosec , Iztok Arcon , Alojz Kodre
DOI: 10.1016/J.JEURCERAMSOC.2005.03.039
关键词:
摘要: Abstract Chemical solution deposition (CSD) methods for ferroelectric thin films make higher reliability and lower processing temperatures feasible. Different reactivities of the constituent transition metal alkoxides may decrease homogeneity on molecular level in ceramic precursors during synthesis subsequent steps: film, drying, consolidation crystallization target phase. In 2-methoxyethanol based Pb(Zr 0.53 Ti 0.47 )O 3 , a selective modification reactive Zr alkoxide by acetic acid results more homogeneous distribution atoms sol as compared to prepared from as-received Zr-propoxide. The improved chemical is reflected functional response films.
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