Transistor heater for microhotplate-based metal-oxide microsensors
作者： M. Graf , S.K. Muller , D. Barrettino , A. Hierlemann
关键词:
摘要: A transistor-type heater is presented, which has been developed to regulate the temperature of microhotplates in industrial CMOS technology. The heating transistor preserves its characteristics up 350/spl deg/C and shows almost linear at temperatures higher than 100/spl deg/C. can be controlled by adjusting source/gate voltage. Sensor measurements for CO are presented two different sensing modes: chemoresistive readout calorimetric means monitoring changes voltage required keep microhotplate preset value. device part an approach monolithically integrate metal-oxide chemical sensors with circuitry.
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sci-hub.se 参考文章(23)
D Briand, A Krauss, B van der Schoot, U Weimar, N Barsan, W Göpel, N.F de Rooij, Design and fabrication of high-temperature micro-hotplates for drop-coated gas sensors Sensors and Actuators B-chemical. ,vol. 68, pp. 223- 233 ,(2000) , 10.1016/S0925-4005(00)00433-0
E. Comini, G. Faglia, G. Sberveglieri, Zhengwei Pan, Zhong L. Wang, Stable and highly sensitive gas sensors based on semiconducting oxide nanobelts Applied Physics Letters. ,vol. 81, pp. 1869- 1871 ,(2002) , 10.1063/1.1504867
F. Udrea, J.W. Gardner, D. Setiadi, J.A. Covington, T. Dogaru, C.C. Lu, W.I. Milne, Design and simulations of SOI CMOS micro-hotplate gas sensors Sensors and Actuators B-chemical. ,vol. 78, pp. 180- 190 ,(2001) , 10.1016/S0925-4005(01)00810-3
A. Heilig, N. Bârsan, U. Weimar, M. Schweizer-Berberich, J.W. Gardner, W. Göpel, Gas identification by modulating temperatures of SnO2-based thick film sensors Sensors and Actuators B-chemical. ,vol. 43, pp. 45- 51 ,(1997) , 10.1016/S0925-4005(97)00096-8
Andreas Hierlemann, Henry Baltes, None, CMOS-based chemical microsensors Analyst. ,vol. 128, pp. 15- 28 ,(2003) , 10.1039/B208563C
Markus Graf, Diego Barrettino, Stefano Taschini, Christoph Hagleitner, Andreas Hierlemann, Henry Baltes, Metal Oxide-Based Monolithic Complementary Metal Oxide Semiconductor Gas Sensor Microsystem Analytical Chemistry. ,vol. 76, pp. 4437- 4445 ,(2004) , 10.1021/AC035432H
Tadashi Takada, Temperature drop of semiconductor gas sensor when exposed to reducing gases — simultaneous measurement of changes in sensor temperature and in resistance Sensors and Actuators B-chemical. ,vol. 66, pp. 1- 3 ,(2000) , 10.1016/S0925-4005(99)00422-0
Isolde Simon, Michael Arndt, Thermal and gas-sensing properties of a micromachined thermal conductivity sensor for the detection of hydrogen in automotive applications Sensors and Actuators A-physical. ,vol. 97, pp. 104- 108 ,(2002) , 10.1016/S0924-4247(01)00825-1
A Heilig, N Barsan, U Weimar, W Göpel, Selectivity enhancement of SnO2 gas sensors: simultaneous monitoring of resistances and temperatures Sensors and Actuators B-chemical. ,vol. 58, pp. 302- 309 ,(1999) , 10.1016/S0925-4005(99)00091-X
J. Wöllenstein, J.A. Plaza, C. Cané, Y. Min, H. Böttner, H.L. Tuller, A novel single chip thin film metal oxide array Sensors and Actuators B-chemical. ,vol. 93, pp. 350- 355 ,(2003) , 10.1016/S0925-4005(03)00218-1