Effect of RF power on the optical and morphological properties of RF plasma polymerised linalyl acetate thin films

作者: L.J. Anderson , M.V. Jacob

DOI: 10.1016/J.APSUSC.2009.12.021

关键词:

摘要: Thin films derived from linalyl acetate were fabricated using the Radio Frequency (RF) plasma polymerisation technique between RF power levels of 10 and 75 W. The optical properties investigated spectroscopic ellipsometry UV–vis spectroscopy 200 1000 nm. An band gap approximately 3 eV for all was determined Tauc plots. surface morphology hardness material studied AFM nano-indentation respectively to determine effect on thin film properties. Smooth surfaces with an average roughness 0.2 nm consistent obtained across levels, while demonstrated a linearly increasing dependence deposition power, values ranging 0.29 0.44 GPa. These studies indicate ability tailor characteristics by varying potential be used within electronic devices as encapsulation layers, insulating or semiconducting layers introduction charge carriers chemical structure material.

参考文章(29)
E.C. Rangel, N.C. Cruz, C.M. Lepienski, Effect of helium implantation on the properties of plasma polymer films Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms. ,vol. 191, pp. 704- 707 ,(2002) , 10.1016/S0168-583X(02)00637-7
Sandra E. Fritz, Tommie Wilson Kelley, C. Daniel Frisbie, Effect of Dielectric Roughness on Performance of Pentacene TFTs and Restoration of Performance with a Polymeric Smoothing Layer Journal of Physical Chemistry B. ,vol. 109, pp. 10574- 10577 ,(2005) , 10.1021/JP044318F
M Salagram, V Krishna Prasad, K Subrahmanyam, Optical band gap studies on xPb3O4–(1−x)P2O5 lead[(II,IV)] phosphate glasses Optical Materials. ,vol. 18, pp. 367- 372 ,(2002) , 10.1016/S0925-3467(01)00175-6
D. Reuter, A. Bertz, M. Nowack, T. Gessner, Thin film encapsulation technology for harms using sacrificial CF-polymer Sensors and Actuators A-physical. ,vol. 145, pp. 316- 322 ,(2008) , 10.1016/J.SNA.2007.11.002
Anubha Jain, P. Sagar, R.M. Mehra, Band gap widening and narrowing in moderately and heavily doped n-ZnO films Solid-state Electronics. ,vol. 50, pp. 1420- 1424 ,(2006) , 10.1016/J.SSE.2006.07.001
L. Durán, J. Castro, J. Naranjo, J.R. Fermín, C.A. Durante Rincón, Optical properties of CuIn5Se8 and CuGa5Se8 from ellipsometric measurements Materials Chemistry and Physics. ,vol. 114, pp. 73- 77 ,(2009) , 10.1016/J.MATCHEMPHYS.2008.08.020
Lidia Favre-Quattropani, Pierangelo Groening, Denis Ramseyer, Louis Schlapbach, The protection of metallic archaeological objects using plasma polymer coatings Surface and Coatings Technology. ,vol. 125, pp. 377- 382 ,(2000) , 10.1016/S0257-8972(99)00579-4