Metal-insulator-metal capacitor and method for manufacturing the same
作者： Sang-Hoon Park
DOI:
关键词: Materials science 、 Electrical engineering 、 Layer (electronics) 、 Insulation layer 、 Capacitor 、 Electrode 、 Protection layer 、 Metal insulator metal capacitor 、 Composite material 、 Dielectric layer
摘要: A capacitor has a lower electrode formed on an insulation layer, dielectric layer the electrode, upper and first protection pattern layer. The is etched using to form electrode. second enclosing pattern.
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