Micromechanical device and method of manufacturing micromechanical device
作者： Yoshiaki Sugizaki , Susumu Obata , Takeshi Miyagi , Michinobu Inoue
DOI:
关键词: Moisture permeability 、 Forensic engineering 、 Deformation (engineering) 、 Materials science 、 Composite material 、 Substrate (printing)
摘要: A micromechanical device according to an aspect of the present invention includes, a substrate, micromachine which is mounted on provided with mechanism deformed by function electric field, and changes electrical characteristics concomitantly deformation, inner inorganic sealing film contains material, principal surface covers through hollow section containing gaseous body therein, opening shape sections allowing communicate outside, organic formed film, blocks up sections, outer material lower moisture permeability than film.
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